Robot Analysis System developed to provide information and alarm of the operating conditions and status and breakdown phenomenon of the Robot, used in semiconductor and LCD equipment, and determine its own problems before they occur, so that users know.

 
※ Related patents: Robot analysis system and analysis methods for the RAS(Robot analysis system)
 
Analysis and Effect Applied Robot
(Equipment, Process)

1. Capture the trouble signs of Robot

VHP ROBOT
- AMAT Endura-Metal
- AMAT Centura- Etch
- AMAT Producer-CVD
- AMAT Ultima-Etch, CVD

XP ROBOT
- AMAT Endura-Metal
2. Minimize the loss(Material, Personnel, Production) caused equipment-stop
   through preventive maintenance of Equipment
3. Rapid analysis and measure to Robot failure
    -Early capture of Robot moving error due to the driving torque variation
    -Capture moving position Error
    -Capture trouble due to poor backlash
 
Configuration of Robot Analysis System
 
1.Capture Module 2.Main(Calculation) Module
-Signal copy between the high-controller and Driver
-Perfect electrical isolation
-Functions control by internal CPU
-Direct control instruction to driver
-Numerical analysis of digital/analog signal
-Internal DSP process for signal processing
-Save of User optional settings
 
 
 
 
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