Air Curtain minimizes the risk of spread of odor and toxic gas, produced by toxic gas and chemical used in semiconductor manufacturing equipment.
Air curtain blocks the toxic gas and odor leaked out of the equipment and diffused through line air conditioning system.

 
 

Features

Process : Spinner and Coater Process, (ex) Photo,
    CVD, etc.
Efficiency blocking odor spead : Over 98%
 
 
 
 
 
 

Features

Adavantage : Smaller Size, Easy installation
Function : Auto/Manual remote control
Auto : Working in opening door
Manual : Working by Engineer on site
 
 
 
 

Features

Placed in a space of equipment
Control supply of regulated air (Available to control 3
    chambers at once)
 
 
 
 
 
 
 
 
 
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