XP Arm remodeling is to improve particle issue and to protect the damage of Elbow itself, Heater and Blade inside Process chamber due to displacement of Elbow bearing.

 
 

 

ELBOW Specification

OEM P/N : 0040-04682(Upper), 0040-04680(Lower)
Material : Aluminum
 

BEARING specification

OEM P/N : SV5203-3ZZSTCS3
Type : Steel ball
 

Improvement by XP Arm remodeling

Solving problem through structural change from
    traditional Elbow and mechanism reinforcement
gurantee for semipermanent operating performance
Prevention from displacement situation in thermic
    expansion of Elbow and Vibration during operation
   
 
 
 
 
 
98-46, Dongtansandan 7-gil, Dongtan-myeon, Hwaseong-si, Gyeonggi-do, 18487,Korea | TEL :+82-31-373-4689 | FAX :+82-31-373-4689 | E-mail :hgs@happysolution.co.kr
COPYRIGHT(C) HAPPY GLOBAL SOLUTION CO.,LTD ALL RIGHTS RESERVED