End-Effector is a Module equipped at the end of Robot Arm and recognize wafer in Foub's docking on Road-port.
Teflon coating after anodizing
Direct on site set-up for localiztion of sensor align skill
 
 

Specification

Material : Aluminium(Body), Peek(Screw)
    (for strengthening corrosion protect, making up for
    particle issue)
Finishing : Black Anodizing, Teflon Coating
Sensor : FT-KV1(SUNX)
AMP : FX-301
Much cost effective with the same specs. than
    competitor's product.
 

Mapping Test

Sensor align by self-designed special Jig

Sensing test of End-effector to wafer using 300mm

    equipment and Foup inside (Complete technical

    realization available with the same conditions as on

    site for new production and repair )

 
 
 
 
 
 
 
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