P5000 ROBOT
 
  Vacuum Wafer Transfer Robot
Moving arm by 2ph AC Servo Motor(1 EA)
Process : ETCH, CVD
Wafer size : 4 inch, 6 inch, 8 inch
 
 
 
ELA DRIVER
 
  Direct control Driver to VHP Robot Motor
High precision position control by Pulse and PID control
 
 
ELC DRIVER
 
  Direct control Driver to XP Robot Motor
High precision position control by Pulse and PID
 
 
 
 
 
98-46, Dongtansandan 7-gil, Dongtan-myeon, Hwaseong-si, Gyeonggi-do, 18487,Korea | TEL :+82-31-373-4689 | FAX :+82-31-373-4689 | E-mail :hgs@happysolution.co.kr
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