300mm Arm for PVD
Position control of Dual Blade 3-axis by Yaskawa Motor of high speed and torque
Ceramic Bearing(for Arm, Pivot) for high temp./vac. and for particle-free
 
 

Specification

Equipment :ULVAC KEYTRAN-IV ZEX H
Process : Metal
Wafer size : 300mm
Repeatability Precision : within ±0.1mm
 

Repair Ass’y

Arm
Pivot

Repair Know-how

Equip with Improved bearings for Particle-free
Supply Remodeled Arm ass'y
Repeatability and Moving Test by exclusive performance
    Test system
 
 
Repair Process
 
 
 
 
 
 
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