VHP+ Robot Arm for Producer PVD

Supply Remodeled Arm ass'y for particle-free

 
 

Specification

Equipment : AMAT Producer Centura, Endura
Process : CVD
Wafer Size : 200mm,300mm
Environment : Vacuum
Repeatability Precision : within ±0.1mm
 

Repair Know-how

Equip with Improved bearings and Cover for Particle
    free
Supply Remodeled and self-designed Arm ass'y
Repeatability and Moving Test by exclusive performance
    Test system
 
 
 
Repair Process
 
 
 
 
 
 
98-46, Dongtansandan 7-gil, Dongtan-myeon, Hwaseong-si, Gyeonggi-do, 18487,Korea | TEL :+82-31-373-4689 | FAX :+82-31-373-4689 | E-mail :hgs@happysolution.co.kr
COPYRIGHT(C) HAPPY GLOBAL SOLUTION CO.,LTD ALL RIGHTS RESERVED