Wafer Transfer Robot
Scara Blade 4-axis by BEXTA Motor
Ceramic Bearing(for Hub, Arm, Pivot) for high temp. and vacuum
 
 

Specification

Equipment : AMAT
Process : METAL, ETCH
Wafer Size : 200mm only
Environment : Vacuum
Repeatability Precision : within ±0.1mm
 
 
 

Repair Ass’y

Motor
Hub
200mm Arm
200mm Pivot
 

Repair Knowhow

Pivot remodeling for improvement of Particle issue
Repeatability precision and Moving Test by exclusive
    performance Test system
Repair Process
 
 
 
 
 
 
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