Wafer Transfer Robot
Position control of Dual Blade 2-axis by DD(Direct Drive) Motor
 
 

Specification

Equipment : AMAT Producer Centura, Endura
Process : ETCH, CVD, METAL
Wafer Size : 200mm,300mm
Environment : Vacuum
Repeatability Precision : within ±0.1mm
 

Repair Ass’y

Motor (Etch, CVD, Ultima)
Motor (Etch, CVD, Ultima)
Hub
200mm Arm
200mm Pivot
300mm Arm
300mm Pivot
 

Repair Know-how

increase in Robot Repair and replacement cycle
Pivot remodeling for improvement of Particle issue
Repeatability precision and Moving Test by exclusive
    performance Test system
Repair Process
 
 
 
 
 
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